First, high-performance field emission gun electron microscope is becoming popular and applied.

The field emission gun transmission electron microscope can provide a high brightness, high coherence electronic light source. Therefore, a comprehensive analysis of the atomic arrangement and species of the material can be performed at the atomic-nanometer scale. In the mid-1990s, there were only a few dozen units in the world; now it has soared to a few thousand units. There are currently more than 100 field emission gun transmission electron microscopes in China.

Conventional hot tungsten filament (electronic) gun scanning electron microscope, the highest resolution can only reach 3.0nm; a new generation of field emission gun scanning electron microscope, the resolution can be better than 1.0nm; ultra-high resolution scanning electron microscope, its resolution The rate is as high as 0.5nm-0.4nm. Among them, the environmental electron microscope can do: true "environmental" conditions, the sample can be observed under 100% humidity conditions; biological samples and non-conducting samples do not need to be coated, and can be directly on the machine for dynamic observation and analysis; Machine with three." High vacuum, low vacuum and "environmental" work modes.

Second, strive to develop a new generation of monochromator, spherical aberration corrector to further improve the resolution of the electron microscope.

Spherical aberration coefficient: The spherical aberration coefficient Cs of conventional TEM is about mm; now the spherical aberration coefficient of transmission electron microscope has been reduced to Cs<0.05mm.

Color Difference Coefficient: The color difference coefficient of a conventional transmission electron microscope is approximately 0.7; now the color difference coefficient of a transmission electron microscope has been reduced to 0.1.

Field emission transmission electron microscopy, STEM technology, and energy-filtering electron microscopy have become essential analytical tools and tools for materials science research and even biomedicine.

The objective lens spherical aberration corrector improves the field emission TEM resolution to the information resolution, that is, from 0.19 nm to 0.12 nm or even less than 0.1 nm.

With a monochromator, the energy resolution will be less than 0.1eV. However, the monochromator beam is only about one-tenth that without the monochromator. Therefore, while using the monochromator, it is also necessary to consider the monochromator at the same time. Beam reduction problem.

Confocal spherical aberration correctors increase the STEM resolution to less than 0.1 nm while the condenser spherical aberration corrector improves the beam current by at least 10 times, which is very advantageous for improving the spatial resolution.

At the same time as the spherical aberration correction, the color difference is increased by about 30%. Therefore, while correcting the spherical aberration, it is also necessary to consider correcting the color difference at the same time.

Third, electron microscopy analysis is moving toward computerization and networking.

In terms of equipment, the operating system of scanning electron microscopes has used a brand new operating interface. Users only need to press the mouse, you can achieve the control of the electronic lens barrel and electrical parts and various parameters of automatic memory and adjustment.

Between different regions, through the network system, demonstrations such as the movement of the sample, the change of the imaging mode, the adjustment of the electron microscope parameters, etc. To achieve the remote control of the electron microscope.

Fourth, the important application of electron microscopy in nanomaterials research.

Since the analysis accuracy of the electron microscope approaches the atomic scale, using a field emission gun transmission electron microscope, using an electron beam with a diameter of 0.13 nm, not only can a Z-contrast image of a single atom be acquired, but also electron energy of a single atom can be collected. Loss spectrum. That is, electron microscopy can obtain the atomic and electronic structure information of materials at the same time. Observing the single atomic image in a sample is always a long-term goal pursued by the scientific community. An atom has a diameter of about 2-3 mm.

Therefore, to distinguish the position of each atom, an electron microscope with a resolution of about 0.1 nm is required, and it is put to approximately 10 million times. It is predicted that when the size of a material is reduced to the nanometer scale, the physical and mechanical properties of the material such as light and electricity may be unique. Therefore, the preparation of nanomaterials such as nanoparticles, nanotubes, and nanofilaments, as well as the relationship between their structure and properties have become a research hotspot.
Using electron microscopy, electron micrographs of high-resolution electron micrographs of nanophases and nanowires, electron diffraction patterns of nanomaterials, and electron energy loss spectra can generally be observed on ultra-high vacuum field emission gun transmission electron microscopes above 200 KV. For example, carbon nanotubes having an inner diameter of 0.4 nm, Si-CN nanorods, and semiconductor nanowires of Li-doped Si are observed on an electron microscope.

In the field of biomedicine, nano-colloidal gold technology, nano-selenium health capsules, nanoscale organelle structures, and nano-robots can be as small as bacteria, monitoring blood concentrations in blood vessels, and removing blood clots in blood vessels. This tool is inseparable from the electron microscope.

In short:

Scanning electron microscopy and transmission electron microscopy have become increasingly important in the science of materials science. The improvement of stability and operability makes electron microscopy no longer a high-level instrument used by a few experts, but has become a popular tool; higher resolution is still the most important direction of the development of electron microscopy; the application of scanning electron microscope and transmission electron microscopy has been from the characterization And the analysis has progressed to in-situ experiments and nano-visible processing; focused ion beam (FIB) has been applied more and more in the research of nanomaterials; FIB/SEM dual-beam electron microscopy is currently used for nanocharacterization, nanoanalysis, and nanofabrication. The most powerful tool for nano-prototyping; the goal of corrective STEM (Titan): to achieve 3D structural characterization at 0.5 Ã… resolution in 2008.

Five, cryogenic electron microscope technology and three-dimensional reconstruction technology is the current research hotspot of bioelectron microscopy.

Low-temperature electron microscope technology and three-dimensional reconstruction technology are currently hot topics in the field of bioelectron microscopy. The main research is the use of cryogenic electron microscopy (which also includes the application of liquid cryostat electron cryo-electron microscope) and computer three-dimensional image reconstruction technology to determine biological The three-dimensional structure of macromolecules and their complexes. For example, the three-dimensional structure of the virus was determined by cryoelectron microscopy and two-dimensional crystals of the membrane protein were grown on a monolayer lipid membrane and observed and analyzed by electron microscopy.

Today's structural biology has attracted a lot of attention because from a systematic point of view the biological world has different hierarchical structures: Individual® Organ® Tissue® Cells® Biomacromolecules. Although biological macromolecules are at the lowest position, they can determine the differences between high-level systems. Three-dimensional structure determines the functional structure is the basis of application: drug design, genetic modification, vaccine research and development, artificial protein, etc., Some people predict that the breakthrough of structural biology will bring revolutionary changes to biology.

Electron microscopy is one of the important methods for structural determination. The advantage of cryogenic electron microscopy is that the sample is in a water-containing state and the molecule is in a natural state. Due to the damage of the sample under irradiation, a low-dose technique must be used for observation; the low observation temperature enhances the radiation resistance of the sample. The samples can be frozen in different states to observe the changes in the molecular structure. Through these techniques, the observation and analysis results of various biological samples can be closer to the real state.

Sixth, high-performance CCD camera is increasingly popular in the electron microscope

The advantages of the CCD are high sensitivity, low noise, and high signal-to-noise ratio. In the same pixel CCD imaging is often very good transparency, sharpness, color reproduction, exposure can guarantee the basic accuracy, camera image resolution / resolution is also how many pixels we often say, in practical applications, the camera The higher the pixel, the better the quality of the captured image. For the same pixel, the higher the pixel resolution, the stronger the ability to parse the image, but the amount of data that is recorded relative to it will be much larger, so the storage device The requirements are much higher.

In today's TEM field, newly developed products are completely computer-controlled, and the acquisition of images is accomplished by high-resolution CCD cameras, rather than photographic negatives. The trend of digital technology is driving thorough changes in TEM applications and the entire laboratory work from all aspects. Especially in image processing software, many things that were previously considered impossible are becoming a reality.

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