Smart vacuum on-line coating thickness gauge

Smart vacuum on-line coating thickness gauge
Core Tips: 1 Basic requirements In order to allow users to directly see the on-line coating machine coating thickness and spraying rate during the spraying process, the system should meet the following basic requirements: There are three LED display coating rate and five Bit LED display coating thickness can be input by the keyboard acoustic impedance of the coating material,

1 Basic requirements In order to allow the user to directly see on the display the thickness of the coating film deposited by the on-line coating machine during the spraying process and the plating rate, the system should meet the following basic requirements: There are three LED display coating rates and five LED display The thickness of the coating can be input by the keyboard to the acoustic impedance and density of the coating material.

When the plating thickness is in line with the predetermined value, the operation of the on-line coating machine should be stopped. If the coating thickness is greater than the predetermined value during the coating, an error display should be promptly displayed. The IPC system should be available to enable data reception, processing, storage, display, and alarm. And printing function 2 thickness gauge hardware design 2.1 Basic composition According to the above request, design system hardware composition and principle block diagram are shown as follows: Coating thickness gauge functional block diagram The thickness gauge mainly includes three modules: can generate self-excited oscillation signal The thickness measurement sensor part, the industrial control system, and the single-chip computer system industrial control system use Advantech IPC to realize real-time coating monitoring. The thickness measurement sensor is composed of a self-oscillation circuit and a Schmitt trigger 74HC14. When measuring the thickness, the 6MHz reference crystal oscillator is used as a front-end sensor to output a sinusoidal signal. The waveform conversion pulse shaping and limiter function of the Schmidt trigger is used. The sine signal is converted into a square wave signal, which can enter the single-chip microcomputer system The single-chip microcomputer system mainly includes the AVR single-chip AT90S8515RS-232C level converter MAX2322KB EfPROMDCMOW, which respectively constitutes the signal processing unit count frequency measurement unit, the keyboard display unit and the serial communication unit 22AVR single chip microcomputer. Features The AVR series microcontrollers are a cost-effective 8-bit embedded controller with powerful instruction capabilities in a single clock cycle, which can realize 1MIPS processing capacity per 1MHz. They have high density, high speed, low power consumption, and small size. I/O lines, non-volatile memory technology, downloadable flash memory, and easy-to-learn instructions. Most models in this series of microcontrollers have a programmable watchdog timer WDT serial communication interface UART, by selecting the PD0 receiving end of the PD port of the AT90S8515 microcontroller, and connecting the level converter MAX232 to the PD1 sending end, writing the corresponding communication program can be realized. Serial communication with the host computer AVR is currently the most widely used a high-performance single-chip microcomputer 23 signal processing unit signal processing unit is the input part of the thickness meter, mainly through the Schmitt Trigger 74HC14 front sensor sent 5-6MHz The sine signal becomes a pulse signal with the same frequency as the input signal of the microcontroller. For details, see 24 Counting Frequency Measuring Unit. The counting frequency measuring unit measures the input signal frequency of the front-end sensor when measuring the thickness. It is the main component of the pre-channel of the thickness meter. Mainly by the counter 74HC393 8 bi-directional transmission receiver 74LS245 composed of frequency measurement when the unit will be processed square wave signal sent to the AT90S8515 counter, after the frequency divider into the microcontroller's input capture pin ICP to complete the square wave signal frequency measurement 25 Keyboard display unit The unit consists of the keyboard display chip SL279LED digital display tube, 4 (4 touch pressure type keyboard composition mainly completes the thickness measurement of coating material selection and coating thickness and rate display, to achieve a one-machine dialogue.

2.6 Serial Communication Unit The serial communication unit consists of the MCU's universal serial interface UART and the serial communication chip RS232, which realizes data communication with the host computer. The baud rate during communication is set by the baud rate register UBRR. The specific program segment is: 3 Coating Thickness Principle The thickness gauge probe is hung on the material nozzle of the on-line coater, and the material is sprayed on the inner wall of the vacuum device simultaneously during sputtering. And on the probe, the sensor probe can send a sinusoidal signal with a frequency of 5~6MHz. After the 74HC14 is transformed into a square wave signal, it enters the single-chip microcomputer for processing and display, and can be serially communicated to the upper IPC system to print on the side thick process. In this case, the material number of the plated material can be input through the keyboard and the density and acoustic impedance of the material can be obtained after calculation. Since the material to be plated differs depending on the vacuum equipment being plated, the coating rate and coating thickness of the coating machine are required to be different. However, the coating thickness of all coating materials should be less than 999.9 K, and the coating rate range should be 0 to 999 A/s. From the above, it can be seen that the coating thickness measurement is achieved through the change of the frequency of the quartz crystal oscillator. Since the quartz crystal oscillator is a one-dimensional oscillator, the acoustic impedance of the coating is related to the propagation of the shear wave in the material. The exact calculation of the coating thickness should be the same as the critical frequency of the crystal without the coating density of the plated quartz crystal. Coating Material Density, Coating Material Acoustic Impedance, Acoustic Impedance and Constant of Quartz Crystal For the calculation of the decimal material number entered by the keyboard, the corresponding material density and acoustic impedance can be obtained by calling the look-up table subroutine and processed by the digital system conversion program. Get the floating-point number form and then participate in the operation The AT90S8515 microcontroller timing and capture interrupt function to obtain the corresponding frequency of coating thickness per second, in the form of floating-point calculations, you can get the floating-point coating film thickness and spray rate. In order to meet people's habits, convert it to floating-point conversion program and get the result in decimal form, send the LED display output, and achieve data communication with the host computer through the serial interface UART. 4 System software design The thickness measurement operation to the keyboard As the manual control part, the two functions of the keyboard are set as follows: Function 1 The material number of the coating material is input from the keyboard, and the system acquires the corresponding density harmony group resistance according to the material number look-up table, and takes it as an operation parameter. The coating material number before coating can also be modified at any time.

Function 2 Enter the film thickness setting value from the keyboard. When the film thickness exceeds the set value, the system stops the test and displays an error. Main program Function Process flow chart Once the plated substance is determined, the system starts to be interrupted by timing or capture. Program control frequency acquisition of 1s, according to the thickness measurement principle, and by calling the appropriate number of system conversion and operation subroutines to obtain the coating thickness per second, and display the output thickness of each successive two as the spray rate, converted to After Decimal display by LED In order to ensure the accuracy of the thickness gauge, all programming uses four-byte floating-point number to participate in the main operation of the program to achieve the following 5 conclusions Vacuum on-line coating thickness gauge based on the principle of AVR microcontroller, can directly follow the online coating Machine work, and timely display and printout of measurement results, measurement accuracy can reach 0.%. In addition, according to the actual requirements of the user, through the keyboard can input up to 80 kinds of coating materials, suitable for different types of vacuum equipment At present, the thickness gauge has been successfully applied to a vacuum equipment manufacturing plant. The actual application results show that the system has With high accuracy, small size, light weight, easy to use and high reliability, it is very suitable for rapid measurement of film thickness during on-line coating.

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